Inner cup type spin coater
Improvement of in-plane distribution using the inner cup method and reduction of coating liquid. Affordable pricing. Demo units available for loan. Rental options: from 15 days to over 1 year.
【Device Specifications】 ・ Board Size: MAX 200mm□ board (within diagonal 300mm) ・ Board Transfer Method: Manual set/reset ・ Device Weight: Approximately 50Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ500mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Option - Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum suction method ・ Table: Option - Please consult separately for size and material ・ Spin Motor: AC servo motor ・ Rotation Speed: MAX 2000rpm (depends on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel
- Company：ブルーオーシャンテクノロジー
- Price：Other
